Can I integrate the 4287A into a semiconductor probe station?

The 4287A can be integrated in a semiconductor probe station, but is not suitable for C-V and high impedance measurement applications for the following reasons:Since the 4287A has a small test head with 1m coaxial test cables, it is possible to install the test head in the probe station similarly to the recommended installation method for the E4991A with Option E4991A-010 Probe Station Connection Kit. However, the 4287A focuses on low impedance measurements (production testing of RF chip inductors) rather than high impedance, and provides no DC bias function. If accurate measurement for low capacitance semiconductor devices (high impedance) is required, the E4991A is recommended.